원판 레조네이터를 기반으로 한 바이오센서 설계 및 공정

다국어 초록 (Multilingual Abstract)

A wide range of biosensors is being used for quantifying biological and biochemical processes, which is very important for medical, biological, and biotechnological applications. A high performance and cost effective biosensor is designed using a contour-mode disk resonator (RCDR). This sensor measures tiny biological mass attached on a disk vibrating at a high frequency, producing high quality of output signal at atmospheric pressure. This paper proposes the fabrication process of radial contour-mode disk resonator. To realize the ideal biosensor, it is fabricated by Si and glass wafer. The fabrication steps include photolithography, etching, and deposition to get desired patterns in each fabrication process, followed by bonding process to each desired wafers.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. 원판 디스크 레조네이터 바이오센서
• 3. 바이오센서 다목적 강건 최적 설계
• 4. 원판 디스크 레조네이터 바이오센서 제조과정
• 4. 결론
• 후기
• 참고문헌