유연 안내 기구를 이용한 초정밀 단일체 1축 스테이지의 최적 설계 = Optimal Design of Monolithic Precision Stage Using Flexure Guide Mechanism

다국어 초록 (Multilingual Abstract)

This paper describes the optimal design of monolithic precision stage using the flexure guide mechanism. The flexure guide mechanism is need to constrain the parasitic motion and adopt a leaf-spring type hinge. The characteristics of the stage is affected by the design parameters of the flexure mechanism. The design parameters are modelled mathematically and verified through the finite element analysis. The precision stage is made monolithically with the optimized design parameters. The stage is tested to verify the performance of the flexure guide mechanism. It is found that the performance of the stage meets the design criteria.