Theoretical and Experimental Analysis of Material Deformation by Microcontact

다국어 초록 (Multilingual Abstract)

This paper reports on an investigation of contact damage induced in molds and substrate materials used in micro and nanoimprint lithography. Silicon, polydimethylsiloxane (PDMS), glass, and silicon carbide were studied. A finite element analysis using ABAQUS software was conducted to investigate the stress induced in mold and substrate materials when they come in contact with each other at a uniaxial pressure of 1 MPa. A spherical indentation experiment was conducted for a model study for various indentation loads and numbers of contact cycles. We examined the contact damage during the spherical indentation. Indentation stress-strain curves, surface views of contact damage, and mechanical properties were characterized for the mold and substrate materials.

목차 (Table of Contents)

• 1. Introduction
• 2. Experimental Procedure
• 3. Conclusions
• ACKNOWLEDGMENT
• REFERENCES