유한요소법을 이용한 탄성힌지 구조체의 응력 및 변형량 분석

다국어 초록 (Multilingual Abstract)

Recently, the world is preparing for new revolution, called, ‘IT(Information Technology), NT(Nano-Technology), and BT(Bio-Technology).’ NT can be applied to various fields such as semiconductor-micro technology. Ultra precision processing is required for NT in the field of mechanical engineering. Because of radical advancement of electronic and photonics industry, necessity of ultra precision processing is on the increase for the manufacture of various kernel parts. In this paper, stability of ultra precision cutting unit is investigated and this unit is the kernel unit in ultra precision processing machine. According to alteration of shape and material of hinge, stability investigation is performed. Hinge shapes of micro stage in Flexure Hinge are designed in two types, where, hinge shapes are composed of round and rectangularity. Elasticity and strength are analyzed on micro stage with respect to hinge shapes by FEM analysis.