나노스케일 폴리머 박막의 기계적 물성 측정 및 평가에 관한 연구 = (A)study on evaluations and measurements of mechanical properties of nanoscale polymer film
In recent years, thin polymer films are widely used in a variety of applications ranging from a microelectronic packaging to a storage device. One of the applications of thin polymer films is a nanoimprinting process. Its technicque engraves nanoscale patterns on a polymer film. During the de-molding process between a stamp and polymer film of nanoimprinting process, distortion or damage of the patterned structure can occur as a result of the adhesion and friction at the interface.
Therefore, it is necessary to know the mechanical properties of polymer in order to determine the critical printing pressure and the maximum printing time of the printing process.
Nanoindentation tests on polymers have been of interest for a long time, not only due to the small sample size requirements but also due to the possibility of a time-response testing. But the mechanical properties of thin polymer films are difficult to measure accurately because of the time-dependent properties. In this study, the following researches were performed.
1) Micro-tensile test was performed to measure the mechanical properties of photosensitive polyimide film of thickness 10 ㎛ by using microtensile tester and laser extensometer. The specimens made with curing temperature of 220 ℃ and 250 ℃ were fabricated with a semiconductor process. The elastic moduli of two specimen were not increased with the testing range of strain-rate. But yield strength was increased with the testing range of strain-rate. The elastic modulus of the specimen with curing temperature of 250 ℃ is higher than that with curing temperature of 220 ℃. Also nanoindentation test was performed with the same specimen by using nanoindenter XP of MTS cooperation. The ratio(E_T(250)/E_(T220)) of elastic modulus measured with microtensile test was ranging from 1.04 to 1.08. The ratio(E_(I250)/E_(I220)) of elastic modulus measured with nanoindentation test is 1.03. Though the absolute values of elastic modulus measured with two test methods were evidently different, the ratios of elastic modulus were almost similar. Therefore, it was proved that nanoindentation technique is reliable method for measuring the mechanical property of polymer film.
2) The mechanical properties of mr-I-8030 and mr-I-9030 polymer films having three different thicknesses were measured by standard indentation and continuous stiffness measurement (CSM) method of nanoindentation. In the case of standard indentation, the hardness and the elastic modulus of mr-I-8030 polymer film were 0.25 GPa and 6.6 GPa and mr-I-9030 polymer film are 0.24 GPa and 6.6 GPa, respectively. In the case of CSM method, the hardness and the elastic modulus of mr-I-8030 polymer film were 0.35 GPa and 6.6 GPa and mr-I-9030 polymer film are 0.29 GPa and 6.2 GPa, respectively. Also, the viscoelastic properties were measured with the standard linear model of linear viscoelasticity. In the creep test of mr-I-8030 polymer film, the measured values of elastic modulus, viscoelastic modulus and viscosity was 5.76 GPa, 29.0 GPa and 322.0 GPa·s, respectively. In the creep test of mr-I-9030 polymer film, the measured values of elastic modulus, viscoelastic modulus and viscosity was 5.76 GPa, 29.1 GPa and 203.1 GPa·s, respectively. The elastic moduli measured by the three test methods showed similar values.
3) Nanoindenter XP (MTS system co.), microscope and CCD image system developed were composed to measure the adhesion and friction properties between PDMS hemisphere and quartz plate under various test conditions. PDMS hemisphere of diameter of 1.5 mm was manufactured by a molding process. The experimental parameters of adhesion test were a loading rate, loading displacement and contact times. From the results of adhesion test, it was shown that adhesion force strongly depends on a loading rate, contact time and loading displacement. Specially, an increase of loading rate and loading displacement strongly affect an increase of adhesion force and contact area. The experimental parameter of friction test was a friction speed. From the results of friction test, it was shown that the higher scratch speed is, the more friction force and friction coefficient decreases. Also, the friction coefficients were affected by the test profile of friction test
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