저기압 방전 플라즈마내 전자비임의 특성 = Characteristics of Electron Beam in Low Pressure Air-Discharge Plasma

다국어 초록 (Multilingual Abstract)

The electron gun which is placed at low pressure air discharge tube produces electron beam. The electron densities, the electron profiles and the energy distributions of the beam are measured by a single probe.
As the result of these measurements, the following characteristics of the lectron beam are obtained.
In a steady state, the magnetic field intensity of 6.3 KAT and the pressure of 40 mtorr, as discharge current is increased from 16mA to 20mA, the electron density at the center of z-axis varied from 8.8 x 10^9 cm^-3 to 12.2 x 10^9 cm ^-3 and FWHM varied a little from 1.30cm to 0.40cm.
In a steady state, the discharge current of 20mA and the pressure of 40 mtorr, as the magnetic field intensity is increased from 2.7 KAT to 6.3 KAT, the electron density varied from 10.1 x 10^9 cm^-3 to 12.2 x 10^9 cm^-3 and FWHM decreased from 1.6 cm to 0.8 cm.
In the steady state, the discharge current of 20mA, the magnetic field intensity of 6.3KAT and the pressure of 40 mtorr, as the distance of probe from cathode is increased from 40cm to 80cm, the electron density decreased from 12.2 x 10^9 cm ^-3 to 12.2 x 10^9 cm ^-3 and FWHM decreased from 1.6 cm to 0.8 cm.
In the steady state, the discharge current of 20mA, the magnetic field intensity of 6.3KAT and the pressure of 40 mtorr, as the distance of probe from cathode is increased from 40cm toe 80cm, the electron density decreased from 12.2 x 10^9^-3 to 7.9 x 10^9 cm ^-3 and FWHM decreased a little from 0.40 cm to 0.28 cm. It is also measured that the high energy electrons are mostly distributed between center of the axis and beam surface (r = 0.2cm).