電子빔勵起 KrF레이저의 出力特性에 대한 시뮤레이숀 解析 = Simulation analysis of output performance for election beam excited KrF laser

다국어 초록 (Multilingual Abstract)

By developing a comprehensive computer simulation code for e-beam excited KrF lasers, we studied mainly the effect of output performance dependence on excitation rate excited by an intense electron beam. Especially for short pulse (＜50 ns) and high excitation rate pumping (＞2Mw/㎤), and under realizable conditions, it is found to calculated with an intrinsic laser effieiency as a function of excitation rate. The results were compared with some experimental results, and a fairly good agreement was obtained. At an excitation rate of 7 Mw/㎤, and at a total gas pressure of 2 atm, an intrinsic efficiency of up to 10.5% is found to be attainable. We have also calculated the KrF^* production efficiency and the laser extraction efficiency, and explained the output performance in terms of excitation rate.